Presentation Information
[23a-P06-15]Characteristic evaluation of IGZO thin films using infrared heated TDS
Shin-Ichi Yamamoto1,2, Reem Alshanbari2, 〇Kunimitsu Maejima3, Meguru Nagai1, Koichi Wani1, Ioannis Kymissis2 (1.Ryukoku Univ., 2.Columbia Univ., 3.ESCO)
Keywords:
Thermal desorption spectroscopy,IGZO,AOS