Presentation Information
[23a-P07-16]Reflectance spectra measurement in magnetic garnet thin film by MOD
〇Shun Nakazawa1, Jian Zhang1, Fatima Zahra Chafi1, Masami Nishikawa1, Masami Kawahara2, Takayuki Ishibashi1 (1.Nagaoka Univ. of Tech., 2.Kojundo Chem. Lab.)
Keywords:
magnetic thin film
Low temperature deposition process is necessary to deposit magnetic garnet on polymer substrates with heat resistance temperature of about 350 ºC, such as polyimide. We have developed a low-temperature deposition method using the excimer-laser assisted MOD and succeeded in lowering the annealing temperature to 450 ºC. However, in order to lower the process temperature to about 350 °C, the temperature in the provisional annealing process must also be lowered. Therefore, in the present study, reflectance spectrum measurements of the samples were performed to evaluate changes during provisional annealing.