Presentation Information
[23a-P07-18]Deposition and Characterization of Epitaxial Cr-Doped ITO Films
〇Haruka Kurihara1, Saiki Kitagawa1,2,3, Toshihiro Nakamura1,3 (1.Graduate School of Human and Environmental Studies, Kyoto Univ., 2.JSPS, 3.ILAS, Kyoto Univ.)
Keywords:
diluted magnetic semiconductor,transparent conducting film,epitaxial thin film
Dilute magnetic semiconductors (DMSs) have gained much attention as one of the most promising materials for spintronic devices. Oxide-based DMSs have been reported to exhibit high-temperature ferromagnetism. In this work, we prepared epitaxially grown Cr-doped ITO films on single crystalline yttria stabilized zirconia substrates with (111) plane orientation by rf magnetron sputtering and investigated systematically their electrical, optical and magnetic properties. The obtained epitaxial Cr-doped ITO films show low electrical resistivity and high transparency in the visible region. The magnetization as a function of magnetic field shows hysteretic behavior at 300 K, which indicates that the epitaxial Cr-doped ITO film is ferromagnetic at room temperature. The coexistence of high electrical conductivity, high visible transparency, and room-temperature ferromagnetism in the Cr-doped ITO films is expected to be a desirable advantage for developing next-generation spintronic devices.