[23p-12H-1~11] 6.1 Ferroelectric thin films

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[23p-12H-6] Effects of PBW Processing on Ferroelectric Materials on Substrate Properties

〇Jun Hirade¹, Masaki Yamaguchi^1,2, Hideo Kimura³ (1.Shibaura Inst. of Tech., 2.IRCGE, Shibaura Inst. of Tech., 3.Yantai Univ.)

Keywords:

Ferroelectric Materials,Micro-fabrication Technique,Effects of proton irradiation

Microfabrication technology using focused proton beams is expected to be a next-generation exposure light source. Previous studies have shown that the irradiated protons remain within substrate. Therefore, we cannot deny the possibility that the electrical properties of the substrates by residual protons. We investigated in detail the effects of proton irradiation on the substrates.