Presentation Information

[23p-12H-9]Development of Integrated Measurement System for Local C-V Mapping and Piezoresponse Force Microscopy

〇(M1)Yuki Noguchi1, Takanori Mimura2, Takao Shimizu2, Hiroshi Funakubo2, Yoshiomi Hiranaga1 (1.Tohoku Univ., 2.Tokyo Tech.)

Keywords:

integrated measurement system,ferroelectric

By observing static domain structure and domain dynamics of ferroelectric using Piezoresponse Force Microscopy (PFM) and Scanning Nonlinear Dielectric Microscopy (SNDM) - based local C-V mapping, various information about ferroelectric can be obtained. In this research, we developed integrated measurement system for local C-V mapping and PFM and observed identical ferroelectric by each measurement mode.