[23p-12K-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[23p-12K-12] Heterogeneous CTFT for LSI on glass substrates

〇(M1)Yuto Ito¹, Akihisa Nagayoshi¹, Sho Suzuki¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

Keywords:

Si,Ge,CFET