[23p-12K-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[23p-12K-13] Performance of DG Cu-MIC p-ch poly-Ge TFTs on plastic substrates and their feasibility for CMOS inverter

〇(B)Akito Kurihara¹, Sho Suzuki¹, Toshiyuki Tsuchiya², Tetsuo Okuyama², Akito Hara¹ (1.Tohoku Gakuin Univ., 2.TOYOBO Co., Ltd.)

Keywords:

TFT,Ge,Cu-MIC