[23p-12K-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)

[23p-12K-15] Thickness Effect on Crystallization by Rapid Thermal Annealing of Sputtered InSb Films Deposited on Glass Using Ne

Ryonosuke Uema¹, Shota Oku¹, Takashi Noguchi¹, Takashi Kajiwara², Taizoh Sadoh², 〇Tatsuya Okada¹ (1.Univ. Ryukyus, 2.Kyushu Univ.)

Keywords:

InSb,RTA