Presentation Information

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[23p-12K-5]Linear agglomeration during the CW-laser lateral-crystallization (IV)

〇Nobuo Sasaki¹, Satoshi Takayama², Rikuto Sasai², Yukiharu Uraoka² (1.Sasaki Consulting, 2.NAIST)

Keywords:

continuous-wave laser,TFT,agglomeration

Groove of Linear agglomeration was observed in the grained CLC area.for CLC on glass. The groove showed crystal orientations when it was observed by EBSD. This groove seems to have remaining Si at the bottom.

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