Presentation Information

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[23p-21C-2][The 45th Paper Award Speech] 263 nm wavelength UV-C LED on face-to-face annealed sputter-deposited AlN with low screw- and mixed-type dislocation densities

〇Hideto Miyake^1,3, Kenjiro Uesugi^2,3, Shigeyuki Kuboya², Kanako Shojiki¹, Shiyu Xiao², Masataka Kubo¹, Takao Nakamura^3,4 (1.Grad. Sch. of Eng., Mie Univ., 2.SPORR, Mie Univ., 3.Grad. Sch. of RIS, Mie Univ., 4.IIS, The Univ. of Tokyo)

Keywords:

AlN,UV-C LED

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