[23p-21C-1~16] 15.4 III-V-group nitride crystals

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[23p-21C-8] Optimization of MicroLED hollowe structure for batch transfer technology

〇Taiki Kitade¹, Atsushi Nishikawa², Alexander Loesing², Hiroto Sekiguchi¹ (1.Toyohashi Tech, 2.ALLOS)

Keywords:

MicroLED,transfer method,hollowed-structured

We have proposed a fabrication method that combines the LED hollow structure formation technique with a transfer technique using a thermal release sheet, and have been developing a bio-embedded flexible LED film for neuroscience research applications. However, since the design guideline of the hollow structure was not obtained, unnecessary gate structures remained and damage to the micro-LEDs were observed after transfer. In this study, we focused on the shape of the gate structure to optimize the micro-LED hollow structure.