[23p-31A-1~15] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[23p-31A-14] Modification of Gallium Oxide Thin Films by Radical Oxidation Treatment

〇Takumi Morita¹, Keiichi Hashimoto², Tomoyuki Suwa², Fuminobu Imaizumi¹ (1.NIT, Oyama, 2.Tohoku Univ. NICHe)

Keywords:

Gallium Oxide,Radical Oxidation