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Fri. Mar 22, 2024

Sat. Mar 23, 2024

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Mon. Mar 25, 2024

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Presentation by Applicant for JSAP Young Scientists Presentation Award

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[The 45th Young Scientist Award Speech] Mobility improvement in heavily-doped SiC (0001), (1120) and (1100) MOSFETs using oxidation minimizing process

13.7 Compound and power devices, process technology and characterization

The 71st JSAP Spring Meeting 2024

Presentation Information

[23p-52A-8][The 45th Young Scientist Award Speech] Mobility improvement in heavily-doped SiC (0001), (1120) and (1100) MOSFETs using oxidation minimizing process

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