Presentation Information
[23p-P03-1]Spectral photosensitivity analysis of Mg2Si photodiodes formed under various
formation time of p-type diffusion layer.
〇Hibiki Katsumata1, Imaizumi Naoki1, Uematsu Tatsuya1, Sakane Shunya1, Udono Haruhiko1 (1.Ibaraki Univ.)
Keywords:
silicide semiconductor,photodiode,photosensitivity