[24a-12F-1~11] 15.7 Crystal characterization, impurities and crystal defects

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[24a-12F-6] High-speed Prediction of oxygen precipitation behavior in Czochralski Si wafers by Digital Twin

〇Takuya Kusunoki¹, Yuta Nagai¹, Susumu Maeda¹, Hironori Banba¹ (1.GlobalWafers Japan Co.,Ltd.)

Keywords:

digital twin,neural network,BMD simulator