Presentation Information

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[24a-12F-7]Quantitative analysis of Sb donors in Si by PL spectroscopy (1) Calibration curve

〇Yoshiji Miyamura¹, Ryosuke Sakemi¹, Daigo Hayashi¹, Shin-ichi Nishizawa¹, Michio Tajima² (1.Kyushu Univ. RIAM, 2.NPERC-J)

Keywords:

silicon,PL,antimony

Photoluminescence (PL) method for quantitative analysis of Sb donors in Si has been demonstrated. Based on PL measurements of Sb-doped Si crystals with varying Sb concentration levels, we obtained a calibration curve for determining the Sb concentration using the intensity ratio of Sb-bound exciton and free exciton as a concentration index.

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