[24a-12F-1~11] 15.7 Crystal characterization, impurities and crystal defects

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[24a-12F-8] Quantitative analysis of Sb donors in Si by PL spectroscopy (2) Analysis of Si co-doped with Sb and P

〇Daigo Hayashi¹, Ryosuke Sakemi¹, Yoshiji Miyamura¹, Shin-ichi Nishizawa¹, Michio Tajima² (1.Kyushu Univ. RIAM, 2.NPERC-J)

Keywords:

silicon,PL,antimony

We have developed a method to quantify Sb and P concentrations in Si crystals co-doped with Sb and P by PL spectroscopy. Since the photon energies of the luminescence due to Sb- and P-bound excitons are extremely close, the separation of the two luminescence peaks is impossible. We have successfully separated the Sb and P components of the peak by utilizing the fact that the intensity ratio of the zero-phonon line and the TO-phonon line is different between Sb and P.