Presentation Information

[24a-12H-9]Local structure analysis of ScGaN film by XAFS

Yu Ikemoto2, Kenichi Hirata1, Hiroyuki Setoyama3, Shinya Ohmagari1, Sri Ayu Anggraini1, Hiroshi Yamada1,2, Morito Akiyama1, 〇Masato Uehara1,2 (1.AIST, 2.Kyushu Univ., 3.SAGA- LS)

Keywords:

piezoelectric,XAFS,Gallium nitride

ScGaN exhibits excellent piezoelectricity and ferroelectricity. Although these properties are thought to be influenced by local atomic structure, research remains limited to first-principles calculations. In this study, we investigated the local structure around Sc and Ga by synchrotron radiation XAFS. We found that the structural change with respect to Sc concentration differs around Sc and Ga.