[24a-12H-1~9] 6.1 Ferroelectric thin films | The 71st JSAP Spring Meeting 2024

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Oral presentation6 Thin Films and Surfaces : 6.1 Ferroelectric thin films

[24a-12H-1~9]6.1 Ferroelectric thin films

Sun. Mar 24, 2024 9:00 AM - 11:30 AM JST
Sun. Mar 24, 2024 12:00 AM - 2:30 AM UTC

12H (Building No. 1)

Isaku Kanno(Kobe Univ.), Tomoaki Yamada(Nagoya Univ.)

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[24a-12H-1]k_t² hysteresis curves of pure AlN thin film SMR

〇Ayaka Hanai^1,2, Yanagitani Takahiko^1,2,3,4 (1.Waseda Univ., 2.ZAIKEN, 3.JST-CREST, 4.JST-FOREST)

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[24a-12H-2]Influence of thickness for Pt bottom electrode on film properties of AlScN

〇Soshun Doko¹, Naoko Matsui¹, Toshikazu Irisawa¹, Koji Tsunekawa¹, Yoshiko Nakamura², Kazuki Okamoto², Hiroshi Funakubo² (1.Canon ANELVA Corp., 2.Tokyo Tech.)

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)English Presentation

[24a-12H-3]High stability of ferroelectricity against hydrogen gas in (Al,Sc)N thin films

〇(P)Nana Sun¹, Kazuki Okamoto¹, Shinnosuke Yasuoka¹, Naoko Matsui², Toshikazu Irisawa², Koji Tsunekawa², Soshun Doko², Hiroshi Funakubo¹ (1.Tokyo Tech., 2.Canon ANELVA Corp.)

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[24a-12H-4]Fabrication of Al_1-xSc_xN/Si heterojunction by sputtering

〇Hiroto Yamada¹, Norifumi Fujimura¹, Takeshi Yoshimura¹ (1.Osaka Metro. Univ.)

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[24a-12H-5]SAW devices consisting of solid flat electrode on periodically polarization inverted structure of c-axis tilted piezoelectric thin film

〇Satoshi Matsumura^1,2, Yohkoh Shimano^1,2, Naoki Ohno^1,2, Takahiko Yanagitani^1,2,3,4, Cho Yasuo⁵ (1.Waseda Univ., 2.ZAIKEN, 3.JST-CREST, 4.JST-FOREST, 5.Tohoku Univ.)

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[24a-12H-6]Increase of Sc solubility in AlN films by Ga substitution and their impact on ferroelectric and piezoelectric properties

Reika Ota¹, Shinosuke Yasuoka¹, Yoshiko Nakamura¹, Kazuki Okamoto¹, Hiroyuki Hara², Daiki Shono², Yoshihiro Ueoka², Masami Mesuda², 〇Hiroshi Funakubo¹ (1.Tokyo Tech., 2.Tosoh Corp.)

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[24a-12H-7]Piezoelectricity and Ferroelectricity of High Sc Concentration ScGaN Film prepared by sputtering method

〇Masato Uehara¹, Kenichi Hirata¹, Yoshiko Nakamura², Shinnosuke Yasuoka², Sri Ayu Anggraini¹, Kazuki Okamoto², Hiroshi Yamada¹, Hiroshi Funakubo², Morito Akiyama¹ (1.AIST, 2.Tokyo Tech.)

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[24a-12H-8]First-principles calculations of spontaneous polarization and piezoelectric constant in ScGaN

〇Kenji Hirata¹, Masato Uehara¹, Hiroshi Yamada¹, Sri Ayu Anggraini¹, Morito Akiyama¹ (1.AIST)

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[24a-12H-9]Local structure analysis of ScGaN film by XAFS

Yu Ikemoto², Kenichi Hirata¹, Hiroyuki Setoyama³, Shinya Ohmagari¹, Sri Ayu Anggraini¹, Hiroshi Yamada^1,2, Morito Akiyama¹, 〇Masato Uehara^1,2 (1.AIST, 2.Kyushu Univ., 3.SAGA- LS)

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