Presentation Information

[24a-12K-5]Solar cells of B-ion-implanted p-BaSi2 films prepared by sputtering

〇Takumi Sato1, Takenaka Haruki1, Rui Du1, Yoichiro Koda2, Masami Mesuda2, Kaoru Toko1, Takashi Suemasu1 (1.Tsukuba Univ., 2.Tosoh Corporation)

Keywords:

semiconductor,solar cell,sputtering