[24p-12G-1~14] 6.3 Oxide electronics

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[24p-12G-11] A study of amorphous SrCO₃ sacrificed layer for water lift-off process

Ryosuke Kajitani¹, Yuduki Hayashi¹, Keisuke Miyazawa², Takeshi Fukuma², 〇Takeshi Kawae¹ (1.Kanazawa Univ., 2.WPI-Nano LSI, Kanazawa Univ.)

Keywords:

oxide thin films,selective growth,water lift-off