[24p-P08-1~9] 8.1 Plasma production and diagnostics

[24p-P08-1] Breakdown and discharge sustaining power of weakly depressurized microwave plasma with high velocity gas flow

〇Kenji Nakabayashi¹, Taina Ogawa¹, Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1.Nagoya Univ, 2.cLPS Nagoya Univ, 3.NIFs)

Keywords:

microwave plasma

The Venturi effect using a high-speed gas flow was used as a means of depressurizing the plasma discharge section without the use of a vacuum device. The pressure of the discharge section and the power required for dielectric breakdown and the power required to maintain the discharge were investigated. The power required for breakdown and discharge tended to decrease as the pressure in the discharge section decreased.