Presentation Information
[24p-P08-5]Consideration of the structure of slot antennas and T-shaped gas-introducing metal pipes using electromagnetic field simulation
〇Hirochika Uratani1, Erdenezaya Bat Orgil1, Yasunori Tanaka1, Yusuke Nakano1, Tatsuo Ishijima1 (1.Kanazawa Univ.)
Keywords:
Microwave Plasma,Electromagnetic field simulation,Plasma CVD
We devised a model combining a rectangular waveguide with a T-shaped gas introduction metal pipe for film formation using the plasma CVD method. We conducted a study using electromagnetic field simulations in order to investigate the effect of the gas introduction metal pipe on the electric field intensity in a slot antenna. The results of the study suggest that the electric field intensity inside the waveguide differs when the slot length is set to 60 mm compared to when it is set to other lengths.