Presentation Information
[24p-P08-6]Measurement of Gas Temperature in Hollow Cathode Discharges by Tunable Diode Laser Absorption Spectroscopy
〇Yoshinobu Matsuda1, Yuya Soga1, Tamiko Oshima1 (1.Nagasaki Univ.)
Keywords:
ECDL,gas temperature,hollow cathode discharge
Gas temperature and metastable Ar atom density in a low-pressure Ar hollow cathode discharge with an inner diameter of 5.4 mm and a length of 20 mm were measured by absorption spectroscopy using an external cavity semiconductor laser. The gas temperature was found to increase in the range of 450-560 K with increasing operating pressure and discharge power when the operating pressure was 100, 200, and 300 Pa and the discharge power was varied from 1-10 W.