Presentation Information
[24p-P08-9]Plasma diagnosis in high power pulsed magnetron sputtering(HPPMS) using laser-induced fluorescence method
〇(B)yuuki nakagawa1, Hiroki Kobayasi1, Eisuke Yokoyama1, Nobuo Nishiniya1, Masaomi Sanekata1, Masahide Tona2, Hiroaki Yamamoto2, Keizo Tsukamoto2, Kiyokazu Fuke3, Keijiro Ohshimo4, Fuminori Misaizu4 (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)
Keywords:
laser-induced fluorescence,magnetron sputtering
Plasmas produced by high power magnetron sputtering (HPPMS) contain neutral/ionic particles and their emitting/non-emitting particles. The plasma diagnostics using various spectroscopic techniques, which are optical emission spectroscopy (OES) for emitting particles, laser-induced fluorescence (LIF) spectroscopy for non-emitting particles, laser absorption spectroscopy for emitting/non-emitting particles, and mass spectrometry for charged particle, and have been performed for the particles being HPPMS plasma.
In the present study, we developed a plasma diagnostic method for HPPMS using LIF for non-emitting particles in the deposition region to compare with the results obtained by particle analysis using our developing time-of-flight mass spectrometry (TOF-MS) for sputtered and/or gas ion particles in the deposition region which is corresponding to the ion acceleration region of TOF-MS. In this presentation, we will also report the results of time evolution measurements of LIF in neutral particles produced in HPPMS.
In the present study, we developed a plasma diagnostic method for HPPMS using LIF for non-emitting particles in the deposition region to compare with the results obtained by particle analysis using our developing time-of-flight mass spectrometry (TOF-MS) for sputtered and/or gas ion particles in the deposition region which is corresponding to the ion acceleration region of TOF-MS. In this presentation, we will also report the results of time evolution measurements of LIF in neutral particles produced in HPPMS.