[24p-P13-1~3] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[24p-P13-2] A Study on Pull-In Characteristics of MEMS Actuators Using Self-Assembled Electrets

〇(M2)Gaku Inoue¹, Ryuji Inokuchi¹, Yuya Tanaka², Daisuke Yamane¹ (1.Rits Univ., 2.Gunma Univ.)

Keywords:

MEMS