The 71st JSAP Spring Meeting 2024
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Session Details

Poster presentation13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[24p-P13-1~3]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 24, 2024 4:00 PM - 6:00 PM JST
Sun. Mar 24, 2024 7:00 AM - 9:00 AM UTC
P13 (Building No. 9)

[24p-P13-1]Study on Silicidation Reaction of Ultrathin Ni-Films with SiH4

〇Shun Tanida1, Keisuke Kimura1, Noriyuki Taoka2, Katsunori Makihara1, Seiichi Miyazaki1 (1.Nagoya Univ., 2.Aichi Inst. Tech.)

[24p-P13-2]A Study on Pull-In Characteristics of MEMS Actuators Using Self-Assembled Electrets

〇(M2)Gaku Inoue1, Ryuji Inokuchi1, Yuya Tanaka2, Daisuke Yamane1 (1.Rits Univ., 2.Gunma Univ.)

[24p-P13-3]A Study on Non-Contact Double-Sided Vibrational Energy Harvesting with Electric Double Layer Electrets

〇Ryuta Iwakawa1, Keigo Nota1, Arata Murakami1, Kazumoto Miwa2, Shimpei Ono2, Daisuke Yamane1 (1.Ritsumeikan Univ, 2.Central Research Institute of Electric Power Industry)
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