Presentation Information
[24p-P16-15]Atmospheric Pressure Chemical Vapor Deposition of Zn-Ga-O Films on c-Plane Sapphire Substrate
〇ARATA SUGAWARA1, Ryuichi Hamazono1, Tomoaki Terasako1, Masakazu Yagi2 (1.Ehime Univ., Grad. School Sci. & Eng., 2.Natl. Inst. Technol (KOSEN). Kagawa Col.)
Keywords:
ZnGa2O4,CVD,Film