Presentation Information
[24p-P16-16]Cross-Sectional Observation of Dislocation Line under Arrow Head-type Etch Pits in β-Ga2O3(001) Epitaxial Substrates
〇(M2)Sou Isaji1, Tomomichi Terada1, Ryuji Nosaka1, Noriyuki Hasuike1, Toshiyuki Isshiki1, Kenji Kobayashi2, Takeshi Fujitani2, Yongzhao Yao3, Yukari Ishikawa3 (1.Kyoto Inst. Tech., 2.Hitachi High-tech, 3.Japan Fine Ceramics Center)
Keywords:
gallium oxide,dislocation,etch-pit