Presentation Information
[24p-P16-17]The Burgers vectors of dislocations corresponding to the Cannonball type etch pits in β-Ga2O3 (001) bulk wafers
〇Tomomichi Terada1, Sou Isaji1, Noriyuki Hasuike1, Toshiyuki Isshiki1, Kenji Kobayashi2, Takeshi Fujitani2, Yongzhao Yao3, Yukari Ishikawa3 (1.Kyoto Inst. Tech., 2.Hitachi High-Tech, 3.Japan Fine Ceramics Center)
Keywords:
Gallium Oxide,dislocation,etch pit