Presentation Information
[24p-P16-32]Fabrication of SnO thin films using SnO2 sputtering target: comparison of post-deposition annealing atmosphere in Ar/H2 and vacuum
〇(M1)Tubasa Kobayasi1, Takuma Kawaguchi1, Kanta Kibishi1, Shinya Aikawa1 (1.Kogakuin Univ.)
Keywords:
Reduction sputtering