Presentation Information
[24p-P16-34]Annealing Indium Tin Oxide film by KrF excimer laser
〇(B)Maiki Sato1, Hisato Yabuta1,2, Yohei Tanaka2, Keita Katayama1, Chihiro Iwamoto4, Kaname Imokawa3, Taisuke Miura3 (1.Kyushu Univ., 2.Department of Gigaphoton Next GLP, 3.Gigaphoton Inc., 4.Ibaraki Univ.)
Keywords:
ITO,KrF Excimer Laser,laser anneal
ITO thin films, which are widely used as transparent conducting films, are crystallized from the amorphous state by annealing in an electric furnace to improve their performance. In this study, annealing was performed using a KrF excimer laser with high repetition rate in order to suppress thermal effects on the underlying layer and substrate. As a result of the experiment, the thin film was successfully crystallized by multiple irradiations. The electrical properties will be presented at the conference.