Presentation Information
[24p-P16-38]Impact of Defect existence on Thermal Diffusion of Ga for ZnO Nanoparticles
〇(M1C)Kenta Onitsuka1, Toshiyuki Yoshida1, Yasuhisa Fujita1 (1.Shimane University Nat. Sci.& Technol.)
Keywords:
ZnO,heat treatment,Particle layer
The use of semi-conductor particulate layers instead of semi-conductor thin films has attracted attention due to its advantages such as a wider choice of substrates and lower cost. Furthermore, ZnO can be used to create them inexpensively and safely. The extremely high sheet resistance of the ZnO nanoparticle layer is a problem. Thermal diffusion with Ga has therefore been used. In this presentation, the influence of the gas atmosphere during Ga thermal diffusion is investigated. The results suggest that the type of defects may influence the Ga thermal diffusion process.