Presentation Information
[24p-P16-41]Improvement of crystallinity in rutile-structured GeO2 thin films
〇Yuri Shimizu1,2, Toyosuke Ibi2, Tsutomu Araki1, Kentaro Kaneko3,2 (1.Col. of Sci. & Eng. Ritsumeikan Univ., 2.Patentix Inc. Patentix Inc., 3.ROST Ritsumeikan Univ.)
Keywords:
r-GeO2,Ultra Wide Bandgap,Power device