Presentation Information

[25a-12J-7]Device simulation of nano-sheet structure by NEGF method

〇Yasuyuki Ohkura1, Yoshinori Oda1, Daisuke Kosemura1, Masanori Harada1, Hideaki Koike1 (1.AdvanceSoft Co.)

Keywords:

modeling and simulation of semiconductor devices,nano structures

Three-dimension device simulator using NEGF method is developed and applied to silicon nano-sheet structure.
Relations with drift-diffusion model are discussed.