[25a-12M-1~11] 7.2 Applications and technologies of electron beams

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[25a-12M-2] Precise measurement of an electron source size for electron microscopy

〇Soichiro Matsunaga¹, Erina Kawamoto¹ (1.Hitachi R&D group)

Keywords:

scanning electron microscopy (SEM),electron source,virtual source

Field emission electron sources, which emit electrons from a tip sharpened to nanometers, are used as electron sources in high-performance electron microscopes. In this study, we propose a method to precisely measure the size of a small electron source. By using a magnifying projection optics with double lenses, we demonstrate that a electron source of several tens of nanometers can be measured with an accuracy of 6.6%. This research contributes to the standards of electron source characterization methods.