[25a-21C-1~10] 15.4 III-V-group nitride crystals

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[25a-21C-3] RF-MBE growth of AlGaN on low-dislocation-density AlN template substrates

〇Ryotaro Kasai¹, Ren Tanaka¹, Momoko Deura², Makoto Urushiyama³, Ryota Akaike³, Takao Nakamura^3,4, Hideto Miyake³, Tsutomu Araki¹ (1.Col. of Sci & Eng., Ritsumeikan Univ., 2.R-GIRO, Ritsumeikan Univ., 3.Grad. Sch. of Eng., Mie Univ., 4.MRPCO, Mie Univ.)

Keywords:

AlGaN,RF-MBE growth,AlN template substrates