[25a-21C-1~10] 15.4 III-V-group nitride crystals

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[25a-21C-8] Heavy Ge-doping in Al-rich AlGaN using pulsed sputtering

〇Aiko Naito¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS)

Keywords:

AlGaN,doping,degenerate