Presentation Information

[25a-21C-9]Growth of nitride thin film on graphene/4H-SiC substrate via sputtering

〇(M1)Minjae Jun1, Kohei Ueno1, Ting Pan2, Keisuke Takemoto2, Kenta Emori2, Hiroshi Fujioka1 (1.Univ. of Tokyo, 2.Nissan Motor Co.)

Keywords:

nitride growth,sputtering,2D material