[25a-61A-1~8] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[25a-61A-7] Defects and electrical properties of ZnO films deposited with Zn supply

〇Yumika Yamada^1,2, Shuhei Funaki², Yasuji Yamada² (1.Kobelco Res. Inst. Inc., 2.Shimane Univ.)

Keywords:

Transparent conducting film,Sputtering deposition,Defect