Presentation Information

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardHighlighted Presentation

[25a-61B-6]High Efficiency Development of Low-GWP Gasses for TSV Process Using Digital Twin

〇Yohei Takakura¹, Takumi Shimosuki², Hiroki Nakamura², Suzuka Okamoto², Yasuhiro Nojiri¹, Osamu Kumagai¹, Hisataka Hayashi¹ (1.Daikin Industries, Ltd. Chemical Division, 2.Daikin Industries, Ltd. Technology and Innovation Center)

Keywords:

digital twin,etching,deposition

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