[25p-1BJ-1~7] CS.6 Code-sharing Session of 6.1 & 13.3 & 13.5

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[25p-1BJ-5] Improvement of the polarization properties of Hf_0.5Zr_0.5O₂ thin films formed by Two-step Flash Lamp Annealing (FLA)

〇Hideaki Tanimura¹, Yuto Ota³, Yuma Ueno¹, Hikaru Kawarazaki¹, Shinichi Kato¹, Takumi Mikawa¹, Yasuo Nara^2,3 (1.SCREEN, 2.Tokyo City Univ., 3.Univ. of Hyogo)

Keywords:

Flash lamp annealing,HfZrO2