Presentation Information
[25p-1BJ-7]Field-induced piezoelectricity of epitaxial YSZ and YHfO2 thin films
〇Ayaka Katsumata1,2, Youkou Shimano1,2, Takahiko Yanagitani1,2,3,4 (1.Waseda Univ., 2.ZAIKEN, 3.JST-CREST, 4.JST-FOREST)
Keywords:
Field-induced piezoelectricity
Since the discovery of ferroelectricity in fluorite structures including HfO2 in Germany in 2011 , its piezoelectricity has also attracted attention. Bulk single-crystal growth of ferroelectric HfO2 has also been reported by doping Y2O3, which was considered difficult.
Therefore, we have fabricated YSZ and HfO2 thin films by sputter epitaxy for BAW resonator applications. However, little piezoelectricity was observed in the As grown films. We measured the conversion loss while applying DC voltage and report that piezoelectricity was induced.
Therefore, we have fabricated YSZ and HfO2 thin films by sputter epitaxy for BAW resonator applications. However, little piezoelectricity was observed in the As grown films. We measured the conversion loss while applying DC voltage and report that piezoelectricity was induced.