Presentation Information
[10a-N301-10]Flip Transfer Process of Micro-LEDs with Sn/In Metal
〇Kazuto Matsui1, Ryota Kanda1, Atsushi Nishikawa2, Alexander Loesing2, Hiroto Sekiguchi3,1 (1.Toyohashi Tech., 2.ALLOS, 3.Meijo Univ.)
Keywords:
Micro-LED,Transfer technology,Metal solder
In order to perform optical stimulation and potential measurement of brain neurons from the same direction, we developed a new transfer method in which micro-LEDs are inverted and directly bonded to metal wiring on a parylene film. A stepless structure was adopted for adjusting the height of the LED electrodes, and Sn/In metal solder was used to ensure bonding. We successfully bonded the inverted LEDs to the metal wiring and confirmed their emission.