[10a-N302-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[10a-N302-11] Statistical Distributions of Subthreshold Current Variability in Bulk MOSFETs at Cryogenic Temperatures

〇Tomoko Mizutani¹, Kiyoshi Takeuchi¹, Takuya Saraya¹, Hiroshi Oka², Takahiro Mori², Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1.Univ. of Tokyo,, 2.AIST)

Keywords:

Cryo-CMOS,Variability,Statistical distribution

In our previous study, we defined two metrics for evaluating subthreshold performance—current onset voltage (COV) and subthreshold voltage (V_SS)—and analyzed their variability in the subthreshold region at both room and cryogenic temperatures. In this study, we further examine the statistical distributions of COV and V_SS.