[10a-N323-1~11] 8.1 Plasma production and diagnostics

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N323-2] Generation of uniform plasma by an auxiliary electrode.

〇Yudai Suzuki¹, Petros Abraha¹ (1.Meijo Univ.)

Keywords:

plasma,uniformity

In plasma surface treatment, plasma density greatly affects treatment results such as surface hardness and surface roughness. Therefore, it is necessary to generate plasma with uniform plasma density within the treatment area. In this study, we attempted to generate uniform plasma relatively easily compared to conventional methods by using an auxiliary electrode with a positive voltage to make uniform the plasma after generation.