[10a-N402-1~11] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[10a-N402-3] Selective-area MOVPE of WZ-AlInP fins on InP(111)A

〇Yuki Azuma¹, Ziye Zheng¹, Taniyama Keita¹, Uchida Ryosei¹, Junichi Motohisa¹, Katsuhiro Tomioka¹ (1.RCIQE)

Keywords:

MOVPE,Selective-area growth,Growth fin structure