[10a-P04-1~22] 13.7 Compound and power devices, process technology and characterization

[10a-P04-18] Electrical characterization of ud-AlGaN/n-GaN structures by electrochemical methods

〇Enku Takahashi¹, Takahiro Shimazaki¹, Satoaki akazawa¹, Kazuhide Kumakura¹, Yoshitaka Taniyasu², Taketomo Sato¹ (1.RCIQE, Hokkaido Univ., 2.NTT Basic Research Labs)

Keywords:

nitride semiconductor,electrochemical characterization