Presentation Information
[10a-P05-2]Investigation of conditions for thick growth of high-Al-content AlGaN layers grown by RF-MBE
〇Ryotaro Kasai1, Ren Tanaka1, Trang Nakamoto2, Ryota Akaike3, Takao Nakamura3,4, Hideto Miyake3, Tsutomu Araki1 (1.Ritsumeikan Univ., 2.R-GIRO, 3.Mie Univ., 4.MRPCO)
Keywords:
AlGaN,RF-MBE,AlN template substrate