[10a-S102-1~9] 17.3 Layered materials

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[10a-S102-9] Reduction of Ti/p-type-WS₂ contact resistance

〇Koki Fukuda¹, Kaede Teraoka¹, Jaehyo Jang¹, Soma Ito¹, Naoki Matsunaga¹, Hitoshi Wakabayashi² (1.Science Tokyo, 2.Science Tokyo IIR)

Keywords:

Transition Metal Dichalcogenide,Contact Resistance,Tungsten Disulfide

For WS₂, which has been reported as n-type operation, p-type operation appears when the surface becomes WO_x through oxidation in air. Assuming n-type operation, AlSc is more effective at reducing contact resistance than Ti in terms of work function. Assuming p-type operation, Ti is more effective at reducing contact resistance than AlSc in terms of reducing power. We investigated which of the contact metals contributes more to reducing contact resistance.